The first nano-scale measuring instrument for ultra-high precision, mirror high reflection and transparent materials in China.Achieve 300nm Z-direction absolute accuracy, 30nm Z-direction repeat accuracy, scanning frame rate of 70kHz, maximum diameter of 80mm.It can be used to measure many kinds of objects such as strong reflection, weak reflection and transparent object.Separation design of the beam splitting module and the optical galvanometer module.The addition of optical galvanometer scanning can replace expensive high-precision displacement tables.It can be widely used in semiconductor wafers, transparent materials, MEMS, precision machined surfaces, material research and other fields.