The two-dimensional MEMS scanning mirror (diameter 3.0mm/diameter 1.4mm) is manufactured using semiconductor silicon technology, ultra-low power static drive, the fast axis can reach several KHZ resonance mode, the slow axis can achieve steady-state rotation, and can realize the two-dimensional space of the beam Progressive scanning; users can choose the appropriate reflecting mirror size according to the actual application of the optical system requirements; the mirror surface is made of aluminum as the standard coating material to provide high reflectivity for visible light wavelength beams; gold can also be used in large-scale manufacturing as the mirror surface Material to achieve high reflectivity in other bands.